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Sulfur Hexafluoride
| Description
Sulfur hexafluoride (SF6) is an inorganic, colorless, odorless, non-toxic and non-flammable gas (under standard conditions). SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule. Typical for a nonpolar gas, it is poorly soluble in water but soluble in nonpolar organic solvents. It is generally transported as a liquefied compressed gas.
| Usage
- Dielectric medium
- Medical use (rentinal detachment repair operations, ultrasound imaging)
- Trace compound
- Semiconductor industry (etchant)
- Magnesium industry
| Physical Properties
| Symbol |
SF6 |
|
Molecular
|
146.06
|
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Liquid density (g/ml) at 25°C
|
1.329 |
|
Boiling point (°C)
|
-64.0
|
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Melting point (°C)
|
-50.7 |
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Critical temperature (°C)
|
45.5
|
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Critical pressure (atm)
|
38.3 |
|
Color, Odor
|
None, None
|
| Quality
| Purity |
Air |
CF4 |
HF |
H2O |
T.H.C |
| ≥99.999% |
≤5.0 |
≤3.0 |
≤0.4 |
≤0.7 |
≤0.4 |
| Supply
| Cylinder size |
44 ~ 47 L |
|
Contents
|
40 ~ 48 kg
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Valve type
|
CGA 590, JIS 22mmR, KS 22mmR |
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